Combined photonics and MEMs function demonstration

O. Blum, M. E. Warren, H. Q. Hou, R. F. Carson, K. D. Choquette, M. S. Rodgers, J. J. Sniegowski

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations


We discuss two examples of integration of micro-electromechanical system (MEMs) and a photonic device. In the first instance, a MEMs locking device pin is driven by a voltage generated by photovoltaic cells connected in series, which are driven by a laser. In the second case, a VCSEL emitting at 1.06 μm is packaged together with a metallized MEMs shutter. By appropriate alignment to the opening in the shutter, the VCSEL is turned on and off by the movement of the Si chopper wheel.

Original languageEnglish (US)
Pages (from-to)57-61
Number of pages5
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1998
Externally publishedYes
EventVertical-Cavity Surface-Emitting Lasers II - San Jose, CA, United States
Duration: Jan 28 1998Jan 29 1998


  • Integration
  • MEMs
  • Microsystem
  • Photonic
  • Shutter

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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