CMOS Active Pixel Sensor (APS) imager for scientific applications

A 512×512 CMOS Active Pixel Sensor (APS) imager has been designed, fabricate, and tested for frontside illumination suitable for use in astronomy specifically in telescope guider systems as a replacement of CCD chips. The imager features a high-speed differential analog readout, 15 μm pixel pitch, 75% fill factor (FF), 62 dB dynamic range, 315Ke- pixel capacity, less than 0.25% fixed pattern noise (FPN), 45 dB signal to noise ratio (SNR) and frame rate of up to 40 FPS. Design was implemented in a standard 0.5 μm CMOS process technology consuming less than 200 mWatts on a single 5 Volt power supply. CMOS Active Pixel Sensor (APS) imager was developed with pixel structure suitable for both frontside and backside illumination holding large number of electron in relatively small pixel pitch of 15 μm. High-speed readout and signal processing circuits were designed to achieve low fixed pattern noise (FPN) and nonuniformity to provide CCD-like analog outputs. Target spectrum range of operation for the imager is in near ultraviolet (300-400 nm) with high quantum efficiency. This device is going to be used as a test vehicle to develop backside-thinning process.