@inproceedings{f4600c11901c4b468a0f0b403b2c2699,
title = "Closed-loop next generation laser polishing",
abstract = "A novel fabrication parameter controlling method for laser polishing processes called CLasso (Control of LASer Surface Optimization) is presented, monitoring within the footprint the smoothening process as well as the removal of ssd in situ. Therefore, it is possible to determine and control the optimum dwell time a footprint needs to stay at a certain point before moving further enabling a more stable and cost optimized polishing.",
author = "Rolf Rascher and Christian Vogt and Oliver F{\"a}hnle and Daewook Kim",
note = "Publisher Copyright: {\textcopyright} COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.; 5th European Seminar on Precision Optics Manufacturing 2018 ; Conference date: 10-04-2018 Through 11-04-2018",
year = "2018",
doi = "10.1117/12.2318749",
language = "English (US)",
isbn = "9781510622708",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Oliver Fahnle and Rolf Rascher",
booktitle = "Fifth European Seminar on Precision Optics Manufacturing",
}