Closed-loop next generation laser polishing

Rolf Rascher, Christian Vogt, Oliver Fähnle, Daewook Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel fabrication parameter controlling method for laser polishing processes called CLasso (Control of LASer Surface Optimization) is presented, monitoring within the footprint the smoothening process as well as the removal of ssd in situ. Therefore, it is possible to determine and control the optimum dwell time a footprint needs to stay at a certain point before moving further enabling a more stable and cost optimized polishing.

Original languageEnglish (US)
Title of host publicationFifth European Seminar on Precision Optics Manufacturing
EditorsOliver Fahnle, Rolf Rascher
PublisherSPIE
ISBN (Print)9781510622708
DOIs
StatePublished - 2018
Externally publishedYes
Event5th European Seminar on Precision Optics Manufacturing 2018 - Teisnach, Germany
Duration: Apr 10 2018Apr 11 2018

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10829
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference5th European Seminar on Precision Optics Manufacturing 2018
Country/TerritoryGermany
CityTeisnach
Period4/10/184/11/18

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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