Closed-loop laser polishing using in-process surface finish metrology

Oliver Faehnle, Rolf Rascher, Christian Vogt, Dae Wook Kim

Research output: Contribution to journalArticlepeer-review

8 Scopus citations


This paper lays out the trail onto a closed-loop polishing process of optical elements enabling the application of the optimum polishing time needed. To that aim, an in-process testing method for monitoring an inclusive micro-surface quality (e.g., comprising surface roughness and scratch-and-dig) within the polishing spot is analyzed, and its applicability to closed-loop polishing for classical loose-abrasive full-aperture polishing as well as for computer-controlled laser polishing is experimentally tested and verified. This enables the determination of the optimum local dwell time resulting in stable and cost-optimized polishing.

Original languageEnglish (US)
Pages (from-to)834-838
Number of pages5
JournalApplied optics
Issue number4
StatePublished - Feb 1 2018

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering


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