Closed-loop laser polishing using in-process surface finish metrology

Oliver Faehnle; Rolf Rascher; Christian Vogt; Dae Wook Kim

doi:10.1364/AO.57.000834

Closed-loop laser polishing using in-process surface finish metrology

Oliver Faehnle, Rolf Rascher, Christian Vogt, Dae Wook Kim

Optical Sciences

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

This paper lays out the trail onto a closed-loop polishing process of optical elements enabling the application of the optimum polishing time needed. To that aim, an in-process testing method for monitoring an inclusive micro-surface quality (e.g., comprising surface roughness and scratch-and-dig) within the polishing spot is analyzed, and its applicability to closed-loop polishing for classical loose-abrasive full-aperture polishing as well as for computer-controlled laser polishing is experimentally tested and verified. This enables the determination of the optimum local dwell time resulting in stable and cost-optimized polishing.

Original language	English (US)
Pages (from-to)	834-838
Number of pages	5
Journal	Applied optics
Volume	57
Issue number	4
DOIs	https://doi.org/10.1364/AO.57.000834
State	Published - Feb 1 2018

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Engineering (miscellaneous)
Electrical and Electronic Engineering

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10.1364/AO.57.000834

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abstract = "This paper lays out the trail onto a closed-loop polishing process of optical elements enabling the application of the optimum polishing time needed. To that aim, an in-process testing method for monitoring an inclusive micro-surface quality (e.g., comprising surface roughness and scratch-and-dig) within the polishing spot is analyzed, and its applicability to closed-loop polishing for classical loose-abrasive full-aperture polishing as well as for computer-controlled laser polishing is experimentally tested and verified. This enables the determination of the optimum local dwell time resulting in stable and cost-optimized polishing.",

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AU - Kim, Dae Wook

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Closed-loop laser polishing using in-process surface finish metrology

Abstract

ASJC Scopus subject areas

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