Cleaning silicon nitride gratings with liquid immersion

Mark Robertson-Tessi; Robert J. Wild; Alexander D. Cronin; Tim Savas

doi:10.1116/1.2202122

Cleaning silicon nitride gratings with liquid immersion

Mark Robertson-Tessi
, Robert J. Wild
, Alexander D. Cronin
, Tim Savas

Physics

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

We demonstrate a method for cleaning sodium deposits off nanofabricated silicon nitride gratings using liquid immersion without damaging the grating. The possibility of cleaning a grating successfully depends on its physical parameters and the type of liquid to be used. We present calculations on surface tension interactions between a liquid and the bars of the grating, and derive the maximum grating-bar span that will survive immersion.

Original language	English (US)
Pages (from-to)	1409-1412
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	24
Issue number	3
DOIs	https://doi.org/10.1116/1.2202122
State	Published - May 2006

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.2202122

Cite this

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title = "Cleaning silicon nitride gratings with liquid immersion",

abstract = "We demonstrate a method for cleaning sodium deposits off nanofabricated silicon nitride gratings using liquid immersion without damaging the grating. The possibility of cleaning a grating successfully depends on its physical parameters and the type of liquid to be used. We present calculations on surface tension interactions between a liquid and the bars of the grating, and derive the maximum grating-bar span that will survive immersion.",

author = "Mark Robertson-Tessi and Wild, \{Robert J.\} and Cronin, \{Alexander D.\} and Tim Savas",

year = "2006",

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language = "English (US)",

volume = "24",

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T1 - Cleaning silicon nitride gratings with liquid immersion

AU - Robertson-Tessi, Mark

AU - Wild, Robert J.

AU - Cronin, Alexander D.

AU - Savas, Tim

PY - 2006/5

Y1 - 2006/5

N2 - We demonstrate a method for cleaning sodium deposits off nanofabricated silicon nitride gratings using liquid immersion without damaging the grating. The possibility of cleaning a grating successfully depends on its physical parameters and the type of liquid to be used. We present calculations on surface tension interactions between a liquid and the bars of the grating, and derive the maximum grating-bar span that will survive immersion.

AB - We demonstrate a method for cleaning sodium deposits off nanofabricated silicon nitride gratings using liquid immersion without damaging the grating. The possibility of cleaning a grating successfully depends on its physical parameters and the type of liquid to be used. We present calculations on surface tension interactions between a liquid and the bars of the grating, and derive the maximum grating-bar span that will survive immersion.

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UR - https://www.scopus.com/pages/publications/33744790621#tab=citedBy

U2 - 10.1116/1.2202122

DO - 10.1116/1.2202122

M3 - Article

AN - SCOPUS:33744790621

SN - 1071-1023

VL - 24

SP - 1409

EP - 1412

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 3

ER -

Cleaning silicon nitride gratings with liquid immersion

Abstract

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