Cleaning silicon nitride gratings with liquid immersion

Mark Robertson-Tessi; Robert J. Wild; Alexander D. Cronin; Tim Savas

doi:10.1116/1.2202122

Cleaning silicon nitride gratings with liquid immersion

Mark Robertson-Tessi, Robert J. Wild, Alexander D. Cronin, Tim Savas

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

We demonstrate a method for cleaning sodium deposits off nanofabricated silicon nitride gratings using liquid immersion without damaging the grating. The possibility of cleaning a grating successfully depends on its physical parameters and the type of liquid to be used. We present calculations on surface tension interactions between a liquid and the bars of the grating, and derive the maximum grating-bar span that will survive immersion.

Original language	English (US)
Pages (from-to)	1409-1412
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	24
Issue number	3
DOIs	https://doi.org/10.1116/1.2202122
State	Published - May 2006
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.2202122

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title = "Cleaning silicon nitride gratings with liquid immersion",

abstract = "We demonstrate a method for cleaning sodium deposits off nanofabricated silicon nitride gratings using liquid immersion without damaging the grating. The possibility of cleaning a grating successfully depends on its physical parameters and the type of liquid to be used. We present calculations on surface tension interactions between a liquid and the bars of the grating, and derive the maximum grating-bar span that will survive immersion.",

author = "Mark Robertson-Tessi and Wild, {Robert J.} and Cronin, {Alexander D.} and Tim Savas",

year = "2006",

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AU - Wild, Robert J.

AU - Cronin, Alexander D.

AU - Savas, Tim

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N2 - We demonstrate a method for cleaning sodium deposits off nanofabricated silicon nitride gratings using liquid immersion without damaging the grating. The possibility of cleaning a grating successfully depends on its physical parameters and the type of liquid to be used. We present calculations on surface tension interactions between a liquid and the bars of the grating, and derive the maximum grating-bar span that will survive immersion.

AB - We demonstrate a method for cleaning sodium deposits off nanofabricated silicon nitride gratings using liquid immersion without damaging the grating. The possibility of cleaning a grating successfully depends on its physical parameters and the type of liquid to be used. We present calculations on surface tension interactions between a liquid and the bars of the grating, and derive the maximum grating-bar span that will survive immersion.

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ER -

Cleaning silicon nitride gratings with liquid immersion

Abstract

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