TY - JOUR
T1 - Cleaning silicon nitride gratings with liquid immersion
AU - Robertson-Tessi, Mark
AU - Wild, Robert J.
AU - Cronin, Alexander D.
AU - Savas, Tim
PY - 2006/5
Y1 - 2006/5
N2 - We demonstrate a method for cleaning sodium deposits off nanofabricated silicon nitride gratings using liquid immersion without damaging the grating. The possibility of cleaning a grating successfully depends on its physical parameters and the type of liquid to be used. We present calculations on surface tension interactions between a liquid and the bars of the grating, and derive the maximum grating-bar span that will survive immersion.
AB - We demonstrate a method for cleaning sodium deposits off nanofabricated silicon nitride gratings using liquid immersion without damaging the grating. The possibility of cleaning a grating successfully depends on its physical parameters and the type of liquid to be used. We present calculations on surface tension interactions between a liquid and the bars of the grating, and derive the maximum grating-bar span that will survive immersion.
UR - http://www.scopus.com/inward/record.url?scp=33744790621&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33744790621&partnerID=8YFLogxK
U2 - 10.1116/1.2202122
DO - 10.1116/1.2202122
M3 - Article
AN - SCOPUS:33744790621
VL - 24
SP - 1409
EP - 1412
JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
SN - 1071-1023
IS - 3
ER -