Chromatic correction of high-performance solid immersion lens systems

Tom D. Milster

doi:10.1143/jjap.38.1777

Chromatic correction of high-performance solid immersion lens systems

Tom D. Milster

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

The chromatic dispersion of hyper-hemisphere solid immersion lens (SIL) systems is discussed. A simple correction mechanism using a diffractive optical element (DOE) is presented that improves the chromatic aberration by a factor of ten.

Original language	English (US)
Pages (from-to)	1777-1779
Number of pages	3
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	38
Issue number	3 B
DOIs	https://doi.org/10.1143/jjap.38.1777
State	Published - 1999

Keywords

Aplanatic lens
Chromatic aberration
Diffractive optical element
Optical data storage
Solid immersion lens

ASJC Scopus subject areas

General Engineering
General Physics and Astronomy

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10.1143/jjap.38.1777

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title = "Chromatic correction of high-performance solid immersion lens systems",

abstract = "The chromatic dispersion of hyper-hemisphere solid immersion lens (SIL) systems is discussed. A simple correction mechanism using a diffractive optical element (DOE) is presented that improves the chromatic aberration by a factor of ten.",

keywords = "Aplanatic lens, Chromatic aberration, Diffractive optical element, Optical data storage, Solid immersion lens",

author = "Milster, {Tom D.}",

year = "1999",

doi = "10.1143/jjap.38.1777",

language = "English (US)",

volume = "38",

pages = "1777--1779",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers",

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publisher = "Japan Society of Applied Physics",

number = "3 B",

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T1 - Chromatic correction of high-performance solid immersion lens systems

AU - Milster, Tom D.

PY - 1999

Y1 - 1999

N2 - The chromatic dispersion of hyper-hemisphere solid immersion lens (SIL) systems is discussed. A simple correction mechanism using a diffractive optical element (DOE) is presented that improves the chromatic aberration by a factor of ten.

AB - The chromatic dispersion of hyper-hemisphere solid immersion lens (SIL) systems is discussed. A simple correction mechanism using a diffractive optical element (DOE) is presented that improves the chromatic aberration by a factor of ten.

KW - Aplanatic lens

KW - Chromatic aberration

KW - Diffractive optical element

KW - Optical data storage

KW - Solid immersion lens

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U2 - 10.1143/jjap.38.1777

DO - 10.1143/jjap.38.1777

M3 - Article

AN - SCOPUS:0032590319

SN - 0021-4922

VL - 38

SP - 1777

EP - 1779

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

IS - 3 B

ER -

Chromatic correction of high-performance solid immersion lens systems

Abstract

Keywords

ASJC Scopus subject areas

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