Charge-coupled devices detectors with high quantum efficiency at UV wavelengths

Erika T. Hamden; April D. Jewell; Charles A. Shapiro; Samuel R. Cheng; Tim M. Goodsall; John Hennessy; Michael Hoenk; Todd Jones; Sam Gordon; Hwei Ru Ong; David Schiminovich; D. Christopher Martin; Shouleh Nikzad

doi:10.1117/1.JATIS.2.3.036003

Charge-coupled devices detectors with high quantum efficiency at UV wavelengths

Erika T. Hamden, April D. Jewell, Charles A. Shapiro, Samuel R. Cheng, Tim M. Goodsall, John Hennessy, Michael Hoenk, Todd Jones, Sam Gordon, Hwei Ru Ong, David Schiminovich, D. Christopher Martin, Shouleh Nikzad

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

Abstract

We report on multilayer high efficiency antireflection coating (ARC) design and development for use at UV wavelengths on CCDs and other Si-based detectors. We have previously demonstrated a set of single-layer coatings, which achieve >50% quantum efficiency (QE) in four bands from 130 to 300 nm. We now present multilayer coating designs that significantly outperform our previous work between 195 and 215 nm. Using up to 11 layers, we present several model designs to reach QE above 80%. We also demonstrate the successful performance of 5 and 11 layer ARCs on silicon and fused silica substrates. Finally, we present a five-layer coating deposited onto a thinned, delta-doped CCD and demonstrate external QE greater than 60% between 202 and 208 nm, with a peak of 67.6% at 206 nm.

Original language	English (US)
Article number	036003
Journal	Journal of Astronomical Telescopes, Instruments, and Systems
Volume	2
Issue number	3
DOIs	https://doi.org/10.1117/1.JATIS.2.3.036003
State	Published - Jul 1 2016
Externally published	Yes

Keywords

UV
antireflection coatings
charge-coupled devices
thin-films

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Control and Systems Engineering
Instrumentation
Astronomy and Astrophysics
Mechanical Engineering
Space and Planetary Science

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10.1117/1.JATIS.2.3.036003

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Hamden, E. T., Jewell, A. D., Shapiro, C. A., Cheng, S. R., Goodsall, T. M., Hennessy, J., Hoenk, M., Jones, T., Gordon, S., Ong, H. R., Schiminovich, D., Martin, D. C., & Nikzad, S. (2016). Charge-coupled devices detectors with high quantum efficiency at UV wavelengths. Journal of Astronomical Telescopes, Instruments, and Systems, 2(3), Article 036003. https://doi.org/10.1117/1.JATIS.2.3.036003

Hamden, ET, Jewell, AD, Shapiro, CA, Cheng, SR, Goodsall, TM, Hennessy, J, Hoenk, M, Jones, T, Gordon, S, Ong, HR, Schiminovich, D, Martin, DC & Nikzad, S 2016, 'Charge-coupled devices detectors with high quantum efficiency at UV wavelengths', Journal of Astronomical Telescopes, Instruments, and Systems, vol. 2, no. 3, 036003. https://doi.org/10.1117/1.JATIS.2.3.036003

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abstract = "We report on multilayer high efficiency antireflection coating (ARC) design and development for use at UV wavelengths on CCDs and other Si-based detectors. We have previously demonstrated a set of single-layer coatings, which achieve >50% quantum efficiency (QE) in four bands from 130 to 300 nm. We now present multilayer coating designs that significantly outperform our previous work between 195 and 215 nm. Using up to 11 layers, we present several model designs to reach QE above 80%. We also demonstrate the successful performance of 5 and 11 layer ARCs on silicon and fused silica substrates. Finally, we present a five-layer coating deposited onto a thinned, delta-doped CCD and demonstrate external QE greater than 60% between 202 and 208 nm, with a peak of 67.6% at 206 nm.",

keywords = "UV, antireflection coatings, charge-coupled devices, thin-films",

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AU - Hamden, Erika T.

AU - Jewell, April D.

AU - Shapiro, Charles A.

AU - Cheng, Samuel R.

AU - Goodsall, Tim M.

AU - Hennessy, John

AU - Hoenk, Michael

AU - Jones, Todd

AU - Gordon, Sam

AU - Ong, Hwei Ru

AU - Schiminovich, David

AU - Martin, D. Christopher

AU - Nikzad, Shouleh

PY - 2016/7/1

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AB - We report on multilayer high efficiency antireflection coating (ARC) design and development for use at UV wavelengths on CCDs and other Si-based detectors. We have previously demonstrated a set of single-layer coatings, which achieve >50% quantum efficiency (QE) in four bands from 130 to 300 nm. We now present multilayer coating designs that significantly outperform our previous work between 195 and 215 nm. Using up to 11 layers, we present several model designs to reach QE above 80%. We also demonstrate the successful performance of 5 and 11 layer ARCs on silicon and fused silica substrates. Finally, we present a five-layer coating deposited onto a thinned, delta-doped CCD and demonstrate external QE greater than 60% between 202 and 208 nm, with a peak of 67.6% at 206 nm.

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KW - charge-coupled devices

KW - thin-films

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Charge-coupled devices detectors with high quantum efficiency at UV wavelengths

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