CHARACTERIZATION OF SOL-GEL DERIVED TANTALUM OXIDE FILMS.

L. A. Silverman; G. Teowee; D. R. Uhlmann

doi:10.1557/proc-73-725

CHARACTERIZATION OF SOL-GEL DERIVED TANTALUM OXIDE FILMS.

L. A. Silverman, G. Teowee, D. R. Uhlmann

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Materials Research Society Symposia Proceedings
Publisher	Materials Research Soc
Pages	725-730
Number of pages	6
ISBN (Print)	0931837391, 9780931837395
DOIs	https://doi.org/10.1557/proc-73-725
State	Published - 1986
Externally published	Yes

Publication series

Name	Materials Research Society Symposia Proceedings
Volume	73
ISSN (Print)	0272-9172

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1557/proc-73-725

Cite this

@inproceedings{253083bdd4ca49278b2e67b316893713,

title = "CHARACTERIZATION OF SOL-GEL DERIVED TANTALUM OXIDE FILMS.",

author = "Silverman, {L. A.} and G. Teowee and Uhlmann, {D. R.}",

year = "1986",

doi = "10.1557/proc-73-725",

language = "English (US)",

isbn = "0931837391",

series = "Materials Research Society Symposia Proceedings",

publisher = "Materials Research Soc",

pages = "725--730",

booktitle = "Materials Research Society Symposia Proceedings",

}

TY - GEN

T1 - CHARACTERIZATION OF SOL-GEL DERIVED TANTALUM OXIDE FILMS.

AU - Silverman, L. A.

AU - Teowee, G.

AU - Uhlmann, D. R.

PY - 1986

Y1 - 1986

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U2 - 10.1557/proc-73-725

DO - 10.1557/proc-73-725

M3 - Conference contribution

AN - SCOPUS:0022992452

SN - 0931837391

SN - 9780931837395

T3 - Materials Research Society Symposia Proceedings

SP - 725

EP - 730

BT - Materials Research Society Symposia Proceedings

PB - Materials Research Soc

ER -

CHARACTERIZATION OF SOL-GEL DERIVED TANTALUM OXIDE FILMS.

Publication series

ASJC Scopus subject areas

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