Characterization of photoresist and simulation of a developed resist profile for the fabrication of gray-scale diffractive optic elements

Jong Rak Park, Justin Sierchio, Melissa Zaverton, Youngsik Kim, Tom D. Milster

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Fingerprint

Dive into the research topics of 'Characterization of photoresist and simulation of a developed resist profile for the fabrication of gray-scale diffractive optic elements'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science