Fingerprint
Dive into the research topics of 'Characterization of pad-wafer contact and surface topography in chemical mechanical planarization using laser confocal microscopy'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Characterization of pad-wafer contact and surface topography in chemical mechanical planarization using laser confocal microscopy
Ting Sun, Yun Zhuang, Leonard Borucki, Ara Philipossian
Research output: Contribution to journal › Article › peer-review
16
Scopus
citations