TY - JOUR
T1 - Characterization of highly hydrophobic coatings deposited onto pre-oxidized silicon from water dispersible organosilanes
AU - Almanza-Workman, A. Marcia
AU - Raghavan, Srini
AU - Petrovic, Slobodan
AU - Gogoi, Bishnu
AU - Deymier, Pierre
AU - Monk, David J.
AU - Roop, Ray
N1 - Funding Information:
Sensor Products Division from Motorola and National Science Foundation funded this work through the GOALI program under Grant No. 9905957. The authors would like to thank Andy Hooper and Xiang-dong Wang from Motorola for their technical assistance and AFM imaging. Special thanks go to Richard Workman and Bert Vermeire for AFM and EIS interpretation.
PY - 2003/1/1
Y1 - 2003/1/1
N2 - The formation and quality of highly hydrophobic coatings deposited from water dispersible organosilanes onto pre-oxidized single crystal silicon were studied using atomic force microscopy, ellipsometry, dynamic contact angle measurements and electrochemical impedance spectroscopy (EIS). Highly hydrophobic films of a commercially available water dispersible silane and two different cationic alkoxysilanes were prepared by dip coating. It was found using atomic force microscopy that, in general, the structure of these highly hydrophobic films is a continuous film with some particulates attributed to bulk polymerization of the precursor molecule in water. Film defects were quantified using EIS by the value of charge transfer resistance at the hydrofluoric acid/silicon interface. Potential applications of this type of coatings include reduction/elimination of stiction in micro-electromechanical systems, contact printing in materials microfabrication, inhibition of corrosion and oxidation, prevention of water wetting, lubrication and protein adsorption.
AB - The formation and quality of highly hydrophobic coatings deposited from water dispersible organosilanes onto pre-oxidized single crystal silicon were studied using atomic force microscopy, ellipsometry, dynamic contact angle measurements and electrochemical impedance spectroscopy (EIS). Highly hydrophobic films of a commercially available water dispersible silane and two different cationic alkoxysilanes were prepared by dip coating. It was found using atomic force microscopy that, in general, the structure of these highly hydrophobic films is a continuous film with some particulates attributed to bulk polymerization of the precursor molecule in water. Film defects were quantified using EIS by the value of charge transfer resistance at the hydrofluoric acid/silicon interface. Potential applications of this type of coatings include reduction/elimination of stiction in micro-electromechanical systems, contact printing in materials microfabrication, inhibition of corrosion and oxidation, prevention of water wetting, lubrication and protein adsorption.
KW - Coating defects
KW - Electrochemical impedance spectroscopy
KW - Hydrophobic coatings
KW - Stiction
KW - Water dispersible organosilanes
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U2 - 10.1016/S0040-6090(02)00997-5
DO - 10.1016/S0040-6090(02)00997-5
M3 - Article
AN - SCOPUS:0037217658
SN - 0040-6090
VL - 423
SP - 77
EP - 87
JO - Thin Solid Films
JF - Thin Solid Films
IS - 1
ER -