Characterization of highly hydrophobic coatings deposited onto pre-oxidized silicon from water dispersible organosilanes

A. Marcia Almanza-Workman; Srini Raghavan; Slobodan Petrovic; Bishnu Gogoi; Pierre Deymier; David J. Monk; Ray Roop

doi:10.1016/S0040-6090(02)00997-5

Characterization of highly hydrophobic coatings deposited onto pre-oxidized silicon from water dispersible organosilanes

A. Marcia Almanza-Workman, Srini Raghavan, Slobodan Petrovic, Bishnu Gogoi, Pierre Deymier, David J. Monk, Ray Roop

Research output: Contribution to journal › Article › peer-review

38 Scopus citations

Abstract

The formation and quality of highly hydrophobic coatings deposited from water dispersible organosilanes onto pre-oxidized single crystal silicon were studied using atomic force microscopy, ellipsometry, dynamic contact angle measurements and electrochemical impedance spectroscopy (EIS). Highly hydrophobic films of a commercially available water dispersible silane and two different cationic alkoxysilanes were prepared by dip coating. It was found using atomic force microscopy that, in general, the structure of these highly hydrophobic films is a continuous film with some particulates attributed to bulk polymerization of the precursor molecule in water. Film defects were quantified using EIS by the value of charge transfer resistance at the hydrofluoric acid/silicon interface. Potential applications of this type of coatings include reduction/elimination of stiction in micro-electromechanical systems, contact printing in materials microfabrication, inhibition of corrosion and oxidation, prevention of water wetting, lubrication and protein adsorption.

Original language	English (US)
Pages (from-to)	77-87
Number of pages	11
Journal	Thin Solid Films
Volume	423
Issue number	1
DOIs	https://doi.org/10.1016/S0040-6090(02)00997-5
State	Published - Jan 1 2003

Keywords

Coating defects
Electrochemical impedance spectroscopy
Hydrophobic coatings
Stiction
Water dispersible organosilanes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/S0040-6090(02)00997-5

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title = "Characterization of highly hydrophobic coatings deposited onto pre-oxidized silicon from water dispersible organosilanes",

abstract = "The formation and quality of highly hydrophobic coatings deposited from water dispersible organosilanes onto pre-oxidized single crystal silicon were studied using atomic force microscopy, ellipsometry, dynamic contact angle measurements and electrochemical impedance spectroscopy (EIS). Highly hydrophobic films of a commercially available water dispersible silane and two different cationic alkoxysilanes were prepared by dip coating. It was found using atomic force microscopy that, in general, the structure of these highly hydrophobic films is a continuous film with some particulates attributed to bulk polymerization of the precursor molecule in water. Film defects were quantified using EIS by the value of charge transfer resistance at the hydrofluoric acid/silicon interface. Potential applications of this type of coatings include reduction/elimination of stiction in micro-electromechanical systems, contact printing in materials microfabrication, inhibition of corrosion and oxidation, prevention of water wetting, lubrication and protein adsorption.",

keywords = "Coating defects, Electrochemical impedance spectroscopy, Hydrophobic coatings, Stiction, Water dispersible organosilanes",

author = "Almanza-Workman, {A. Marcia} and Srini Raghavan and Slobodan Petrovic and Bishnu Gogoi and Pierre Deymier and Monk, {David J.} and Ray Roop",

note = "Funding Information: Sensor Products Division from Motorola and National Science Foundation funded this work through the GOALI program under Grant No. 9905957. The authors would like to thank Andy Hooper and Xiang-dong Wang from Motorola for their technical assistance and AFM imaging. Special thanks go to Richard Workman and Bert Vermeire for AFM and EIS interpretation. ",

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doi = "10.1016/S0040-6090(02)00997-5",

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T1 - Characterization of highly hydrophobic coatings deposited onto pre-oxidized silicon from water dispersible organosilanes

AU - Almanza-Workman, A. Marcia

AU - Raghavan, Srini

AU - Petrovic, Slobodan

AU - Gogoi, Bishnu

AU - Deymier, Pierre

AU - Monk, David J.

AU - Roop, Ray

N1 - Funding Information: Sensor Products Division from Motorola and National Science Foundation funded this work through the GOALI program under Grant No. 9905957. The authors would like to thank Andy Hooper and Xiang-dong Wang from Motorola for their technical assistance and AFM imaging. Special thanks go to Richard Workman and Bert Vermeire for AFM and EIS interpretation.

PY - 2003/1/1

Y1 - 2003/1/1

N2 - The formation and quality of highly hydrophobic coatings deposited from water dispersible organosilanes onto pre-oxidized single crystal silicon were studied using atomic force microscopy, ellipsometry, dynamic contact angle measurements and electrochemical impedance spectroscopy (EIS). Highly hydrophobic films of a commercially available water dispersible silane and two different cationic alkoxysilanes were prepared by dip coating. It was found using atomic force microscopy that, in general, the structure of these highly hydrophobic films is a continuous film with some particulates attributed to bulk polymerization of the precursor molecule in water. Film defects were quantified using EIS by the value of charge transfer resistance at the hydrofluoric acid/silicon interface. Potential applications of this type of coatings include reduction/elimination of stiction in micro-electromechanical systems, contact printing in materials microfabrication, inhibition of corrosion and oxidation, prevention of water wetting, lubrication and protein adsorption.

AB - The formation and quality of highly hydrophobic coatings deposited from water dispersible organosilanes onto pre-oxidized single crystal silicon were studied using atomic force microscopy, ellipsometry, dynamic contact angle measurements and electrochemical impedance spectroscopy (EIS). Highly hydrophobic films of a commercially available water dispersible silane and two different cationic alkoxysilanes were prepared by dip coating. It was found using atomic force microscopy that, in general, the structure of these highly hydrophobic films is a continuous film with some particulates attributed to bulk polymerization of the precursor molecule in water. Film defects were quantified using EIS by the value of charge transfer resistance at the hydrofluoric acid/silicon interface. Potential applications of this type of coatings include reduction/elimination of stiction in micro-electromechanical systems, contact printing in materials microfabrication, inhibition of corrosion and oxidation, prevention of water wetting, lubrication and protein adsorption.

KW - Coating defects

KW - Electrochemical impedance spectroscopy

KW - Hydrophobic coatings

KW - Stiction

KW - Water dispersible organosilanes

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Characterization of highly hydrophobic coatings deposited onto pre-oxidized silicon from water dispersible organosilanes

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