Characterization of Ge2Sb2Te5 thin film alloys using conductive-tip atomic force microscopy

Chia Min Chang; Yen Ju Liu; Ming Lun Tseng; Nien Nan Chu; Ding Wei Huang; Masud Mansuripur; Din Ping Tsai

doi:10.1002/pssb.201200356

Characterization of Ge₂Sb₂Te₅ thin film alloys using conductive-tip atomic force microscopy

Chia Min Chang
, Yen Ju Liu
, Ming Lun Tseng
, Nien Nan Chu
, Ding Wei Huang
, Masud Mansuripur
, Din Ping Tsai

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

Conductive-tip atomic force microscopy (C-AFM) is a powerful tool for investigating the electrical characteristics of phase-change materials commonly used for electronic and optical data storage. We demonstrate the usefulness of this technique by examining the electrical conductivity of crystalline marks recorded with a focused laser pulse on a thin Ge₂Sb₂Te₅ film.

Original language	English (US)
Pages (from-to)	1945-1950
Number of pages	6
Journal	Physica Status Solidi (B) Basic Research
Volume	249
Issue number	10
DOIs	https://doi.org/10.1002/pssb.201200356
State	Published - Oct 2012

Keywords

Electronic data storage
Materials and process characterization
Optical recording
Phase-change materials

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

Access to Document

10.1002/pssb.201200356

Cite this

@article{6cd1545c5edc4ac2b8a3a72ae982c5a8,

title = "Characterization of Ge2Sb2Te5 thin film alloys using conductive-tip atomic force microscopy",

abstract = "Conductive-tip atomic force microscopy (C-AFM) is a powerful tool for investigating the electrical characteristics of phase-change materials commonly used for electronic and optical data storage. We demonstrate the usefulness of this technique by examining the electrical conductivity of crystalline marks recorded with a focused laser pulse on a thin Ge2Sb2Te5 film.",

keywords = "Electronic data storage, Materials and process characterization, Optical recording, Phase-change materials",

author = "Chang, \{Chia Min\} and Liu, \{Yen Ju\} and Tseng, \{Ming Lun\} and Chu, \{Nien Nan\} and Huang, \{Ding Wei\} and Masud Mansuripur and Tsai, \{Din Ping\}",

year = "2012",

month = oct,

doi = "10.1002/pssb.201200356",

language = "English (US)",

volume = "249",

pages = "1945--1950",

journal = "Physica Status Solidi (B) Basic Research",

issn = "0370-1972",

publisher = "John Wiley and Sons Inc.",

number = "10",

}

TY - JOUR

T1 - Characterization of Ge2Sb2Te5 thin film alloys using conductive-tip atomic force microscopy

AU - Chang, Chia Min

AU - Liu, Yen Ju

AU - Tseng, Ming Lun

AU - Chu, Nien Nan

AU - Huang, Ding Wei

AU - Mansuripur, Masud

AU - Tsai, Din Ping

PY - 2012/10

Y1 - 2012/10

N2 - Conductive-tip atomic force microscopy (C-AFM) is a powerful tool for investigating the electrical characteristics of phase-change materials commonly used for electronic and optical data storage. We demonstrate the usefulness of this technique by examining the electrical conductivity of crystalline marks recorded with a focused laser pulse on a thin Ge2Sb2Te5 film.

AB - Conductive-tip atomic force microscopy (C-AFM) is a powerful tool for investigating the electrical characteristics of phase-change materials commonly used for electronic and optical data storage. We demonstrate the usefulness of this technique by examining the electrical conductivity of crystalline marks recorded with a focused laser pulse on a thin Ge2Sb2Te5 film.

KW - Electronic data storage

KW - Materials and process characterization

KW - Optical recording

KW - Phase-change materials

UR - https://www.scopus.com/pages/publications/84867225481

UR - https://www.scopus.com/pages/publications/84867225481#tab=citedBy

U2 - 10.1002/pssb.201200356

DO - 10.1002/pssb.201200356

M3 - Article

AN - SCOPUS:84867225481

SN - 0370-1972

VL - 249

SP - 1945

EP - 1950

JO - Physica Status Solidi (B) Basic Research

JF - Physica Status Solidi (B) Basic Research

IS - 10

ER -