Characterization of Ge2Sb2Te5 thin film alloys using conductive-tip atomic force microscopy

Chia Min Chang, Yen Ju Liu, Ming Lun Tseng, Nien Nan Chu, Ding Wei Huang, Masud Mansuripur, Din Ping Tsai

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


Conductive-tip atomic force microscopy (C-AFM) is a powerful tool for investigating the electrical characteristics of phase-change materials commonly used for electronic and optical data storage. We demonstrate the usefulness of this technique by examining the electrical conductivity of crystalline marks recorded with a focused laser pulse on a thin Ge2Sb2Te5 film.

Original languageEnglish (US)
Pages (from-to)1945-1950
Number of pages6
JournalPhysica Status Solidi (B) Basic Research
Issue number10
StatePublished - Oct 2012


  • Electronic data storage
  • Materials and process characterization
  • Optical recording
  • Phase-change materials

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics


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