@inproceedings{d2dba34be3704d7ebe3c60b7dfa7a42b,
title = "Characterization of cavitation in ultrasonic or megasonic irradiated gas saturated solutions using a hydrophone",
keywords = "Cavitation, Feature damage, Hydrophone, Megasonic, Ultrasonic, Wafer cleaning",
author = "M. Zhao and R. Balachandran and Madigappu, {P. R.} and P. Yam and C. Zanelli and R. Sierra and M. Keswani",
year = "2015",
doi = "10.4028/www.scientific.net/SSP.219.165",
language = "English (US)",
series = "Solid State Phenomena",
publisher = "Trans Tech Publications Ltd",
pages = "165--169",
editor = "Mertens, {Paul W.} and Marc Meuris and Marc Heyns and Marc Meuris and Marc Heyns",
booktitle = "Ultra Clean Processing of Semiconductor Surfaces XII",
note = "12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2014 ; Conference date: 21-09-2014 Through 24-09-2014",
}