CCD soft-X-ray detectors with improved high- and low-energy performance

B. E. Burke; J. A. Gregory; A. H. Loomis; M. Lesser; M. W. Bautz; S. E. Kissel; D. D. Rathman; R. M. Osgood; M. J. Cooper; T. A. Lind; G. R. Ricker

doi:10.1109/TNS.2004.835901

CCD soft-X-ray detectors with improved high- and low-energy performance

B. E. Burke
, J. A. Gregory
, A. H. Loomis
, M. Lesser
, M. W. Bautz
, S. E. Kissel
, D. D. Rathman
, R. M. Osgood
, M. J. Cooper
, T. A. Lind
, G. R. Ricker

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

We describe results from recent enhancements to the performance of charge-coupled devices (CCDs) to both low- and high-energy soft X-rays. For improved low-energy (E < 500 eV) sensitivity, we show that a low-temperature surface treatment on back-illuminated devices results in superior energy resolution compared to that of the devices flown on Chandra, which had a more process-intensive, high-temperature treatment. For improved high-energy response, we describe a design approach for MOS CCDs that allows high substrate biases for deep depletion (up to 160 μm) and, thus, improved X-ray detection for E > 5 keV.

Original language	English (US)
Pages (from-to)	2322-2327
Number of pages	6
Journal	IEEE Transactions on Nuclear Science
Volume	51
Issue number	5 I
DOIs	https://doi.org/10.1109/TNS.2004.835901
State	Published - Oct 2004

ASJC Scopus subject areas

Nuclear and High Energy Physics
Nuclear Energy and Engineering
Electrical and Electronic Engineering

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10.1109/TNS.2004.835901

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@article{cc4b4ba338334c528ac7372466c875da,

title = "CCD soft-X-ray detectors with improved high- and low-energy performance",

abstract = "We describe results from recent enhancements to the performance of charge-coupled devices (CCDs) to both low- and high-energy soft X-rays. For improved low-energy (E < 500 eV) sensitivity, we show that a low-temperature surface treatment on back-illuminated devices results in superior energy resolution compared to that of the devices flown on Chandra, which had a more process-intensive, high-temperature treatment. For improved high-energy response, we describe a design approach for MOS CCDs that allows high substrate biases for deep depletion (up to 160 μm) and, thus, improved X-ray detection for E > 5 keV.",

author = "Burke, \{B. E.\} and Gregory, \{J. A.\} and Loomis, \{A. H.\} and M. Lesser and Bautz, \{M. W.\} and Kissel, \{S. E.\} and Rathman, \{D. D.\} and Osgood, \{R. M.\} and Cooper, \{M. J.\} and Lind, \{T. A.\} and Ricker, \{G. R.\}",

note = "Funding Information: Manuscript received November 30, 2003; revised May 11, 2004. This work was supported by the Department of the Air Force under Contract F19628-00-C-0002. Opinions, interpretations, conclusions, and recommendations are those of the authors and are not necessarily endorsed by the United States Government.",

year = "2004",

month = oct,

doi = "10.1109/TNS.2004.835901",

language = "English (US)",

volume = "51",

pages = "2322--2327",

journal = "IEEE Transactions on Nuclear Science",

issn = "0018-9499",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "5 I",

}

TY - JOUR

T1 - CCD soft-X-ray detectors with improved high- and low-energy performance

AU - Burke, B. E.

AU - Gregory, J. A.

AU - Loomis, A. H.

AU - Lesser, M.

AU - Bautz, M. W.

AU - Kissel, S. E.

AU - Rathman, D. D.

AU - Osgood, R. M.

AU - Cooper, M. J.

AU - Lind, T. A.

AU - Ricker, G. R.

N1 - Funding Information: Manuscript received November 30, 2003; revised May 11, 2004. This work was supported by the Department of the Air Force under Contract F19628-00-C-0002. Opinions, interpretations, conclusions, and recommendations are those of the authors and are not necessarily endorsed by the United States Government.

PY - 2004/10

Y1 - 2004/10

N2 - We describe results from recent enhancements to the performance of charge-coupled devices (CCDs) to both low- and high-energy soft X-rays. For improved low-energy (E < 500 eV) sensitivity, we show that a low-temperature surface treatment on back-illuminated devices results in superior energy resolution compared to that of the devices flown on Chandra, which had a more process-intensive, high-temperature treatment. For improved high-energy response, we describe a design approach for MOS CCDs that allows high substrate biases for deep depletion (up to 160 μm) and, thus, improved X-ray detection for E > 5 keV.

AB - We describe results from recent enhancements to the performance of charge-coupled devices (CCDs) to both low- and high-energy soft X-rays. For improved low-energy (E < 500 eV) sensitivity, we show that a low-temperature surface treatment on back-illuminated devices results in superior energy resolution compared to that of the devices flown on Chandra, which had a more process-intensive, high-temperature treatment. For improved high-energy response, we describe a design approach for MOS CCDs that allows high substrate biases for deep depletion (up to 160 μm) and, thus, improved X-ray detection for E > 5 keV.

UR - https://www.scopus.com/pages/publications/8344286432

UR - https://www.scopus.com/pages/publications/8344286432#tab=citedBy

U2 - 10.1109/TNS.2004.835901

DO - 10.1109/TNS.2004.835901

M3 - Article

AN - SCOPUS:8344286432

SN - 0018-9499

VL - 51

SP - 2322

EP - 2327

JO - IEEE Transactions on Nuclear Science

JF - IEEE Transactions on Nuclear Science

IS - 5 I

ER -

CCD soft-X-ray detectors with improved high- and low-energy performance

Abstract

ASJC Scopus subject areas

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