Cavity optomechanics with stoichiometric SiN films

D. J. Wilson, C. A. Regal, S. B. Papp, H. J. Kimble

Research output: Contribution to journalArticlepeer-review

225 Scopus citations


We study high-stress SiN films for reaching the quantum regime with mesoscopic oscillators connected to a room-temperature thermal bath, for which there are stringent requirements on the oscillators' quality factors and frequencies. Our SiN films support mechanical modes with unprecedented products of mechanical quality factor Qm and frequency νm reaching Qmνm2×1013Hz. The SiN membranes exhibit a low optical absorption characterized by Im(n)10-5 at 935 nm, representing a 15 times reduction for SiN membranes. We have developed an apparatus to simultaneously cool the motion of multiple mechanical modes based on a short, high-finesse Fabry-Perot cavity and present initial cooling results along with future possibilities.

Original languageEnglish (US)
Article number207204
JournalPhysical review letters
Issue number20
StatePublished - Nov 13 2009
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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