Buried refractive microlenses formed by selective oxidation of AlGaAs

O. Blum; K. L. Lear; H. Q. Hou; M. E. Warren

doi:10.1049/el:19960887

Buried refractive microlenses formed by selective oxidation of AlGaAs

O. Blum, K. L. Lear, H. Q. Hou, M. E. Warren

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

The authors demonstrate a novel method of fabricating buried refractive microlenses formed by selective oxidation of AlGaAs epitaxial layers on a GaAs substrate. By appropriate tailoring of the Al mole fraction in the vertical direction, a lens-shaped oxidation shape was achieved. Performance of the microlenses formed in this way was experimentally evaluated at 980nm, and modelled theoretically.

Original language	English (US)
Pages (from-to)	1406-1408
Number of pages	3
Journal	Electronics Letters
Volume	32
Issue number	15
DOIs	https://doi.org/10.1049/el:19960887
State	Published - Jul 18 1996
Externally published	Yes

Keywords

Aluminium gallium arsenide
Oxidation

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1049/el:19960887

Cite this

@article{b494504c808944f598665e1d92326201,

title = "Buried refractive microlenses formed by selective oxidation of AlGaAs",

abstract = "The authors demonstrate a novel method of fabricating buried refractive microlenses formed by selective oxidation of AlGaAs epitaxial layers on a GaAs substrate. By appropriate tailoring of the Al mole fraction in the vertical direction, a lens-shaped oxidation shape was achieved. Performance of the microlenses formed in this way was experimentally evaluated at 980nm, and modelled theoretically.",

keywords = "Aluminium gallium arsenide, Oxidation",

author = "O. Blum and Lear, \{K. L.\} and Hou, \{H. Q.\} and Warren, \{M. E.\}",

year = "1996",

month = jul,

day = "18",

doi = "10.1049/el:19960887",

language = "English (US)",

volume = "32",

pages = "1406--1408",

journal = "Electronics Letters",

issn = "0013-5194",

publisher = "John Wiley \& Sons Inc.",

number = "15",

}

TY - JOUR

T1 - Buried refractive microlenses formed by selective oxidation of AlGaAs

AU - Blum, O.

AU - Lear, K. L.

AU - Hou, H. Q.

AU - Warren, M. E.

PY - 1996/7/18

Y1 - 1996/7/18

N2 - The authors demonstrate a novel method of fabricating buried refractive microlenses formed by selective oxidation of AlGaAs epitaxial layers on a GaAs substrate. By appropriate tailoring of the Al mole fraction in the vertical direction, a lens-shaped oxidation shape was achieved. Performance of the microlenses formed in this way was experimentally evaluated at 980nm, and modelled theoretically.

AB - The authors demonstrate a novel method of fabricating buried refractive microlenses formed by selective oxidation of AlGaAs epitaxial layers on a GaAs substrate. By appropriate tailoring of the Al mole fraction in the vertical direction, a lens-shaped oxidation shape was achieved. Performance of the microlenses formed in this way was experimentally evaluated at 980nm, and modelled theoretically.

KW - Aluminium gallium arsenide

KW - Oxidation

UR - https://www.scopus.com/pages/publications/0030194528

UR - https://www.scopus.com/inward/citedby.url?scp=0030194528&partnerID=8YFLogxK

U2 - 10.1049/el:19960887

DO - 10.1049/el:19960887

M3 - Article

AN - SCOPUS:0030194528

SN - 0013-5194

VL - 32

SP - 1406

EP - 1408

JO - Electronics Letters

JF - Electronics Letters

IS - 15

ER -

Buried refractive microlenses formed by selective oxidation of AlGaAs

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this