Buried refractive microlenses formed by selective oxidation of AlGaAs

O. Blum; K. L. Lear; H. Q. Hou; M. E. Warren

doi:10.1049/el:19960887

Buried refractive microlenses formed by selective oxidation of AlGaAs

O. Blum, K. L. Lear, H. Q. Hou, M. E. Warren

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

The authors demonstrate a novel method of fabricating buried refractive microlenses formed by selective oxidation of AlGaAs epitaxial layers on a GaAs substrate. By appropriate tailoring of the Al mole fraction in the vertical direction, a lens-shaped oxidation shape was achieved. Performance of the microlenses formed in this way was experimentally evaluated at 980nm, and modelled theoretically.

Original language	English (US)
Pages (from-to)	1406-1408
Number of pages	3
Journal	Electronics Letters
Volume	32
Issue number	15
DOIs	https://doi.org/10.1049/el:19960887
State	Published - Jul 18 1996
Externally published	Yes

Keywords

Aluminium gallium arsenide
Oxidation

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1049/el:19960887

Cite this

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title = "Buried refractive microlenses formed by selective oxidation of AlGaAs",

abstract = "The authors demonstrate a novel method of fabricating buried refractive microlenses formed by selective oxidation of AlGaAs epitaxial layers on a GaAs substrate. By appropriate tailoring of the Al mole fraction in the vertical direction, a lens-shaped oxidation shape was achieved. Performance of the microlenses formed in this way was experimentally evaluated at 980nm, and modelled theoretically.",

keywords = "Aluminium gallium arsenide, Oxidation",

author = "O. Blum and Lear, {K. L.} and Hou, {H. Q.} and Warren, {M. E.}",

year = "1996",

month = jul,

day = "18",

doi = "10.1049/el:19960887",

language = "English (US)",

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journal = "Electronics Letters",

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publisher = "Institution of Engineering and Technology",

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T1 - Buried refractive microlenses formed by selective oxidation of AlGaAs

AU - Blum, O.

AU - Lear, K. L.

AU - Hou, H. Q.

AU - Warren, M. E.

PY - 1996/7/18

Y1 - 1996/7/18

N2 - The authors demonstrate a novel method of fabricating buried refractive microlenses formed by selective oxidation of AlGaAs epitaxial layers on a GaAs substrate. By appropriate tailoring of the Al mole fraction in the vertical direction, a lens-shaped oxidation shape was achieved. Performance of the microlenses formed in this way was experimentally evaluated at 980nm, and modelled theoretically.

AB - The authors demonstrate a novel method of fabricating buried refractive microlenses formed by selective oxidation of AlGaAs epitaxial layers on a GaAs substrate. By appropriate tailoring of the Al mole fraction in the vertical direction, a lens-shaped oxidation shape was achieved. Performance of the microlenses formed in this way was experimentally evaluated at 980nm, and modelled theoretically.

KW - Aluminium gallium arsenide

KW - Oxidation

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DO - 10.1049/el:19960887

M3 - Article

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JO - Electronics Letters

JF - Electronics Letters

IS - 15

ER -

Buried refractive microlenses formed by selective oxidation of AlGaAs

Abstract

Keywords

ASJC Scopus subject areas

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