Broadband UV small-spot spectroscopic ellipsometer

Timothy R. Piwonka-Corle, Torsten R. Kaack, K. F. Scoffone, Xing Chen, K. B. Malwankar, Mark E. Keefer, Lloyd J. LaComb, Jean Louis Stehle, Jean P. Piel, Dorian Zahorski, O. Thomas, J. P. Rey, L. Escadafals

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

The design of the world's first production worthy broadband ultra-violet and visible small spot spectroscopic ellipsometer is described. The instrument, called the Prometrix UV-1250SE, was developed by the Prometrix division of Tencor Instruments in cooperation with SOPRA S.A., a pioneer in the field of spectroscopic ellipsometry. It has the ability to measure both the thickness and refractive index of different layers on a wide variety of materials in multiple layer film stacks. In this paper the optical system will be reviewed and spot size data presented. We will further discuss some of the design considerations such as the angle of incidence and allowed spread of the collection beam. Data characterizing the precision and stability of the instrument is presented for a variety of films including SiO2 on silicon, and Si3N4 on silicon, and a multiple layer stack of SiO2/poly- Si/SiO2 on silicon.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages114-125
Number of pages12
Volume2439
ISBN (Print)0819417874, 9780819417879
DOIs
StatePublished - 1995
EventIntegrated Circuit Metrology, Inspection, and Process Control IX - Santa Clara, CA, USA
Duration: Feb 20 1995Feb 22 1995

Other

OtherIntegrated Circuit Metrology, Inspection, and Process Control IX
CitySanta Clara, CA, USA
Period2/20/952/22/95

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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