Blister-like local buckling of polysilicon microbeams during wet-release

Xin Zhang; Yitshak Zohar; Tong Yi Zhang

Blister-like local buckling of polysilicon microbeams during wet-release

Xin Zhang
, Yitshak Zohar
, Tong Yi Zhang

Research output: Contribution to conference › Paper › peer-review

Abstract

A blister-like local buckling of polysilicon microbeams is observed at the end of the fabrication process. This buckling mode is a result of the capillary forces, developed during the drying stage, and the compressive residual stress in the polysilicon beams. A variety of microbeams were fabricated to study this phenomenon. The major parameters controlling the blister-like buckling have been identified experimentally. Furthermore, a model equation is derived to predict the blister properties as a function of the initial conditions. The agreement between the predictions and the measurements is found to be satisfactory.

Original language	English (US)
Pages	379-384
Number of pages	6
State	Published - 1998
Externally published	Yes
Event	Proceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition - Anaheim, CA, USA Duration: Nov 15 1998 → Nov 20 1998

Other

Other	Proceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition
City	Anaheim, CA, USA
Period	11/15/98 → 11/20/98

ASJC Scopus subject areas

Software
Mechanical Engineering

Cite this

@conference{21f55a862b384c3d9abc279567036d60,

title = "Blister-like local buckling of polysilicon microbeams during wet-release",

abstract = "A blister-like local buckling of polysilicon microbeams is observed at the end of the fabrication process. This buckling mode is a result of the capillary forces, developed during the drying stage, and the compressive residual stress in the polysilicon beams. A variety of microbeams were fabricated to study this phenomenon. The major parameters controlling the blister-like buckling have been identified experimentally. Furthermore, a model equation is derived to predict the blister properties as a function of the initial conditions. The agreement between the predictions and the measurements is found to be satisfactory.",

author = "Xin Zhang and Yitshak Zohar and Zhang, \{Tong Yi\}",

year = "1998",

language = "English (US)",

pages = "379--384",

note = "Proceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition ; Conference date: 15-11-1998 Through 20-11-1998",

}

TY - CONF

T1 - Blister-like local buckling of polysilicon microbeams during wet-release

AU - Zhang, Xin

AU - Zohar, Yitshak

AU - Zhang, Tong Yi

PY - 1998

Y1 - 1998

N2 - A blister-like local buckling of polysilicon microbeams is observed at the end of the fabrication process. This buckling mode is a result of the capillary forces, developed during the drying stage, and the compressive residual stress in the polysilicon beams. A variety of microbeams were fabricated to study this phenomenon. The major parameters controlling the blister-like buckling have been identified experimentally. Furthermore, a model equation is derived to predict the blister properties as a function of the initial conditions. The agreement between the predictions and the measurements is found to be satisfactory.

AB - A blister-like local buckling of polysilicon microbeams is observed at the end of the fabrication process. This buckling mode is a result of the capillary forces, developed during the drying stage, and the compressive residual stress in the polysilicon beams. A variety of microbeams were fabricated to study this phenomenon. The major parameters controlling the blister-like buckling have been identified experimentally. Furthermore, a model equation is derived to predict the blister properties as a function of the initial conditions. The agreement between the predictions and the measurements is found to be satisfactory.

UR - https://www.scopus.com/pages/publications/0032293833

UR - https://www.scopus.com/pages/publications/0032293833#tab=citedBy

M3 - Paper

AN - SCOPUS:0032293833

SP - 379

EP - 384

T2 - Proceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition

Y2 - 15 November 1998 through 20 November 1998

ER -

Blister-like local buckling of polysilicon microbeams during wet-release

Abstract

Other

ASJC Scopus subject areas

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