BLISTER-LIKE LOCAL BUCKLING OF POLYSILICON MICROBEAMS DURING WET-RELEASE

Xin Zhang, Yitshak Zohar, Tong Yi Zhang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'BLISTER-LIKE LOCAL BUCKLING OF POLYSILICON MICROBEAMS DURING WET-RELEASE'. Together they form a unique fingerprint.

Engineering & Materials Science