TY - GEN
T1 - BLISTER-LIKE LOCAL BUCKLING OF POLYSILICON MICROBEAMS DURING WET-RELEASE
AU - Zhang, Xin
AU - Zohar, Yitshak
AU - Zhang, Tong Yi
N1 - Publisher Copyright:
© 1998 American Society of Mechanical Engineers (ASME). All rights reserved.
PY - 1998
Y1 - 1998
N2 - A blister-like local buckling of polysilicon microbeams is observed at the end of the fabrication process. This buckling mode is a result of the capillary forces, developed during the drying stage, and the compressive residual stress in the polysilicon beams. A variety of microbeams were fabricated to study this phenomenon. The major parameters controlling the blister-like buckling have been identified experimentally. Furthermore, a model equation is derived to predict the blister properties as a function of the initial conditions. The agreement between the predictions and the measurements is found to be satisfactory.
AB - A blister-like local buckling of polysilicon microbeams is observed at the end of the fabrication process. This buckling mode is a result of the capillary forces, developed during the drying stage, and the compressive residual stress in the polysilicon beams. A variety of microbeams were fabricated to study this phenomenon. The major parameters controlling the blister-like buckling have been identified experimentally. Furthermore, a model equation is derived to predict the blister properties as a function of the initial conditions. The agreement between the predictions and the measurements is found to be satisfactory.
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U2 - 10.1115/IMECE1998-1272
DO - 10.1115/IMECE1998-1272
M3 - Conference contribution
AN - SCOPUS:85125013262
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
SP - 379
EP - 384
BT - Micro-Electro-Mechanical Systems (MEMS)
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 1998 International Mechanical Engineering Congress and Exposition, IMECE 1998
Y2 - 15 November 1998 through 20 November 1998
ER -