Abstract
A blister-like local buckling of polysilicon microbeams is observed at the end of the fabrication process. This buckling mode is a result of the capillary forces, developed during the drying stage, and the compressive residual stress in the polysilicon beams. A variety of microbeams were fabricated to study this phenomenon. The major parameters controlling the blister-like buckling have been identified experimentally. Furthermore, a model equation is derived to predict the blister properties as a function of the initial conditions. The agreement between the predictions and the measurements is found to be satisfactory.
Original language | English (US) |
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Pages | 379-384 |
Number of pages | 6 |
State | Published - 1998 |
Externally published | Yes |
Event | Proceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition - Anaheim, CA, USA Duration: Nov 15 1998 → Nov 20 1998 |
Other
Other | Proceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition |
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City | Anaheim, CA, USA |
Period | 11/15/98 → 11/20/98 |
ASJC Scopus subject areas
- Software
- Mechanical Engineering