TY - JOUR
T1 - Biodegradability, cytotoxicity, and physicochemical treatability of two novel perfluorooctane sulfonate-free photoacid generators
AU - Sun, Wenjie
AU - Gamez, Victor M.
AU - Otero-Gonzalez, Lila
AU - Cho, Youngjin
AU - Ober, Christopher K.
AU - Sierra-Alvarez, Reyes
PY - 2013/2
Y1 - 2013/2
N2 - There is a need for effective, environmentally compatible photoacid generators (PAGs) for application in photolithography for microelectronic device fabrication. Perfluoroalkyl sulfonates (PFAS) used in conventional PAG formulations, such as perfluorooctane sulfonate (PFOS), are under increasing scrutiny due to their widespread environmental distribution and toxicity. Recently, two new PFAS-free, PAG anions with semifluorinated sulfonate anions containing biomolecules (γ-butyrolactone or d-glucose groups) were successfully applied as PAGs. In this study, the biodegradation potential, cytotoxicity, and physicochemical treatability of the new PAG anions was evaluated. PFOS and perfluorobutane sulfonate (PFBS) were used as reference materials in all of the assays. The new PAGs were susceptible to partial degradation by microorganisms in aerobic activated sludge, and these were also readily removed by chemical oxidative treatment with Fenton's reagent [H 2O2/Fe(II)]. In contrast, the compounds were resistant to microbial and chemical attack under reductive conditions as indicated by the low removal efficiencies observed with anaerobic biodegradation assays and chemical assays with zero-valent iron, respectively. The enhanced biodegradation potential and treatability make of the new PAGs attractive materials to resolve current issues related to the lithographic performance and environmental concerns.
AB - There is a need for effective, environmentally compatible photoacid generators (PAGs) for application in photolithography for microelectronic device fabrication. Perfluoroalkyl sulfonates (PFAS) used in conventional PAG formulations, such as perfluorooctane sulfonate (PFOS), are under increasing scrutiny due to their widespread environmental distribution and toxicity. Recently, two new PFAS-free, PAG anions with semifluorinated sulfonate anions containing biomolecules (γ-butyrolactone or d-glucose groups) were successfully applied as PAGs. In this study, the biodegradation potential, cytotoxicity, and physicochemical treatability of the new PAG anions was evaluated. PFOS and perfluorobutane sulfonate (PFBS) were used as reference materials in all of the assays. The new PAGs were susceptible to partial degradation by microorganisms in aerobic activated sludge, and these were also readily removed by chemical oxidative treatment with Fenton's reagent [H 2O2/Fe(II)]. In contrast, the compounds were resistant to microbial and chemical attack under reductive conditions as indicated by the low removal efficiencies observed with anaerobic biodegradation assays and chemical assays with zero-valent iron, respectively. The enhanced biodegradation potential and treatability make of the new PAGs attractive materials to resolve current issues related to the lithographic performance and environmental concerns.
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U2 - 10.1007/s00244-012-9822-z
DO - 10.1007/s00244-012-9822-z
M3 - Article
C2 - 23104522
AN - SCOPUS:84873630242
SN - 0090-4341
VL - 64
SP - 187
EP - 197
JO - Archives of Environmental Contamination and Toxicology
JF - Archives of Environmental Contamination and Toxicology
IS - 2
ER -