Behavior of Polyethylene Oxide Based Nonionic Surfactants in Silicon Processing Using Alkaline Solutions

Joong S. Jeon, Srini Raghavan, Roger P. Sperline

Research output: Contribution to journalArticlepeer-review

25 Scopus citations

Fingerprint

Dive into the research topics of 'Behavior of Polyethylene Oxide Based Nonionic Surfactants in Silicon Processing Using Alkaline Solutions'. Together they form a unique fingerprint.

Material Science

Keyphrases