Back-illuminated large-format Loral CCDs

Michael P. Lesser

Back-illuminated large-format Loral CCDs

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The authors use charge-coupled devices (CCDs) from a lot of Loral wafers containing 3072 × 1024 and 800 × 1200 pixel detectors. These CCDs were specifically designed for astronomical spectrographic applications with the intention of thinning them at Steward Observatory for backside illumination. The thinning procedure and how it relates to the packaging method developed to keep the devices flat for use in fast optical beams are described. Initial results with a new oxidation procedure to allow better backside charging is also described. This oxidation method is especially effective with biased gate-charging techniques which apply a voltage directly over the backside oxide.

Original language	English (US)
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Publisher	Publ by Int Soc for Optical Engineering
Pages	177-182
Number of pages	6
ISBN (Print)	0819405469
State	Published - 1991
Event	Charge-Coupled Devices and Solid State Optical Sensors II - San Jose, CA, USA Duration: Feb 25 1991 → Feb 27 1991

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	1447
ISSN (Print)	0277-786X

Other

Other	Charge-Coupled Devices and Solid State Optical Sensors II
City	San Jose, CA, USA
Period	2/25/91 → 2/27/91

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Cite this

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title = "Back-illuminated large-format Loral CCDs",

abstract = "The authors use charge-coupled devices (CCDs) from a lot of Loral wafers containing 3072 × 1024 and 800 × 1200 pixel detectors. These CCDs were specifically designed for astronomical spectrographic applications with the intention of thinning them at Steward Observatory for backside illumination. The thinning procedure and how it relates to the packaging method developed to keep the devices flat for use in fast optical beams are described. Initial results with a new oxidation procedure to allow better backside charging is also described. This oxidation method is especially effective with biased gate-charging techniques which apply a voltage directly over the backside oxide.",

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year = "1991",

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PY - 1991

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AB - The authors use charge-coupled devices (CCDs) from a lot of Loral wafers containing 3072 × 1024 and 800 × 1200 pixel detectors. These CCDs were specifically designed for astronomical spectrographic applications with the intention of thinning them at Steward Observatory for backside illumination. The thinning procedure and how it relates to the packaging method developed to keep the devices flat for use in fast optical beams are described. Initial results with a new oxidation procedure to allow better backside charging is also described. This oxidation method is especially effective with biased gate-charging techniques which apply a voltage directly over the backside oxide.

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M3 - Conference contribution

AN - SCOPUS:0025901870

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T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 177

EP - 182

BT - Proceedings of SPIE - The International Society for Optical Engineering

PB - Publ by Int Soc for Optical Engineering

T2 - Charge-Coupled Devices and Solid State Optical Sensors II

Y2 - 25 February 1991 through 27 February 1991

ER -

Back-illuminated large-format Loral CCDs

Abstract

Publication series

Other

ASJC Scopus subject areas

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