TY - GEN
T1 - AUTOMATIC CLOSED-LOOP ULTRAFAST LASER STRESS FIGURING USING ON-MACHINE DIFFERENTIAL DEFLECTOMETRY
AU - Esparza, Marcos A.
AU - Laverty, Kevin A.
AU - Chalifoux, Brandon D.
AU - Kim, Daewook
N1 - Publisher Copyright:
© (2023) by American Society for Precision Engineering (ASPE) All rights reserved.
PY - 2023
Y1 - 2023
N2 - We present a method of accurately figuring thin, high aspect ratio, fused silica mirrors utilizing focused ultrafast laser pulses. Building on previous work using differential deflectometry as the method for the metrology step of this iterative process, we have made the figuring process automatic and closed loop. This upgrade to the process allows thin mirrors to be figured with minimal operator intervention. We present results of figuring a 25.4 mm diameter, 1mm thick, fused silica mirror.
AB - We present a method of accurately figuring thin, high aspect ratio, fused silica mirrors utilizing focused ultrafast laser pulses. Building on previous work using differential deflectometry as the method for the metrology step of this iterative process, we have made the figuring process automatic and closed loop. This upgrade to the process allows thin mirrors to be figured with minimal operator intervention. We present results of figuring a 25.4 mm diameter, 1mm thick, fused silica mirror.
UR - http://www.scopus.com/inward/record.url?scp=85158931378&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85158931378&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85158931378
T3 - 2023 ASPE Winter Topical Meeting: Precision Optical Metrology Workshop
SP - 30
EP - 34
BT - 2023 ASPE Winter Topical Meeting
PB - American Society for Precision Engineering, ASPE
T2 - 2023 ASPE Winter Topical Meeting: Precision Optical Metrology Workshop
Y2 - 6 March 2023 through 7 March 2023
ER -