Atomic Force Microscopy Analysis of Rough Si Surfaces Induced by Copper Contamination in HF and BHF Solutions

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@article{ddcabfba9e854b098258c347e293c030,

title = "Atomic Force Microscopy Analysis of Rough Si Surfaces Induced by Copper Contamination in HF and BHF Solutions",

author = "Romero, \{Jeremias D.\} and Jeon, \{Joong S.\} and Tim Hossain and Guangming Li and Srini Raghavan",

year = "1998",

language = "English (US)",

volume = "20",

pages = "165--167",

journal = "Scanning",

issn = "0161-0457",

publisher = "John Wiley and Sons Inc.",

number = "3",

}

TY - JOUR

T1 - Atomic Force Microscopy Analysis of Rough Si Surfaces Induced by Copper Contamination in HF and BHF Solutions

AU - Romero, Jeremias D.

AU - Jeon, Joong S.

AU - Hossain, Tim

AU - Li, Guangming

AU - Raghavan, Srini

PY - 1998

Y1 - 1998

UR - https://www.scopus.com/pages/publications/1542737232

UR - https://www.scopus.com/pages/publications/1542737232#tab=citedBy

M3 - Article

AN - SCOPUS:1542737232

SN - 0161-0457

VL - 20

SP - 165

EP - 167

JO - Scanning

JF - Scanning

IS - 3

ER -