Atomic Force Microscopy Analysis of Rough Si Surfaces Induced by Copper Contamination in HF and BHF Solutions

Jeremias D. Romero, Joong S. Jeon, Tim Hossain, Guangming Li, Srini Raghavan

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)165-167
Number of pages3
Issue number3
StatePublished - 1998

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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