Atomic Force Microscopy Analysis of Rough Si Surfaces Induced by Copper Contamination in HF and BHF Solutions

Jeremias D. Romero, Joong S. Jeon, Tim Hossain, Guangming Li, Srini Raghavan

Research output: Contribution to journal › Article › peer-review

ASJC Scopus subject areas

@article{ddcabfba9e854b098258c347e293c030,

title = "Atomic Force Microscopy Analysis of Rough Si Surfaces Induced by Copper Contamination in HF and BHF Solutions",

author = "Romero, {Jeremias D.} and Jeon, {Joong S.} and Tim Hossain and Guangming Li and Srini Raghavan",

year = "1998",

language = "English (US)",

volume = "20",

pages = "165--167",

journal = "Scanning",

issn = "0161-0457",

publisher = "John Wiley and Sons Inc.",

number = "3",

}

TY - JOUR

T1 - Atomic Force Microscopy Analysis of Rough Si Surfaces Induced by Copper Contamination in HF and BHF Solutions

AU - Romero, Jeremias D.

AU - Jeon, Joong S.

AU - Hossain, Tim

AU - Li, Guangming

AU - Raghavan, Srini

PY - 1998

Y1 - 1998

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UR - http://www.scopus.com/inward/citedby.url?scp=1542737232&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:1542737232

SN - 0161-0457

VL - 20

SP - 165

EP - 167

JO - Scanning

JF - Scanning

IS - 3

ER -