Fingerprint
Dive into the research topics of 'Application of the stribeck+ curve in silicon dioxide chemical mechanical planarization'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Application of the stribeck+ curve in silicon dioxide chemical mechanical planarization
Ruochen Han, Yasa Sampurno, Siannie Theng, Fransisca Sudargho, Yun Zhuang, Ara Philipossian
Research output: Contribution to journal › Article › peer-review
16
Scopus
citations