Abstract
We present an optical surface description that is more suitable for designing annular field systems than the standard aspheric surface representation. The use of this novel surface description leads to shorter design times and improved systems.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 3401-3403 |
| Number of pages | 3 |
| Journal | Optical Engineering |
| Volume | 36 |
| Issue number | 12 |
| DOIs | |
| State | Published - Dec 1997 |
Keywords
- Annular fields
- Aspheric surfaces
- Lithography
- Optical surfaces
- Optical systems
- Projection cameras
- Reflective systems
- Ring fields
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- General Engineering
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