Analysis of diffraction efficiency of TI-PLM and its potential in beam steering

Chuan Luo, Jiafan Guan, Xianyue Deng, Yuzuru Takashima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


A concept of Texas Instrument (TI)-Phase-only Spatial Light Modulator (PLM) is reported which utilizing the dynamic piston motion of PLM pixels to form a discretized blazed grating. By fully manipulating the piston motion of pixels and increasing the available discretization level of the quasi-blazed grating, the Diffraction Efficiency (DE) can achieve close to 99%, which qualifies PLM an ideal candidate for beam steering functionality combining with its MEMS based high refresh rate and large aperture. The DE of the discretized blazed grating is proven to have 86% with 633 nm monochromatic light incident at 25° with 16 discretization levels and 2 round-Trip phase modulation by RCWA algorithm. Furthermore, additional factors which lead to the degradation of diffraction efficiency is also analyzed.

Original languageEnglish (US)
Title of host publicationODS 2021
Subtitle of host publicationIndustrial Optical Devices and Systems
EditorsRyuichi Katayama, Yuzuru Takashima
ISBN (Electronic)9781510644946
StatePublished - 2021
Event2021 Industrial Optical Devices and Systems, ODS 2021 - San Diego, United States
Duration: Aug 1 2021Aug 5 2021

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


Conference2021 Industrial Optical Devices and Systems, ODS 2021
Country/TerritoryUnited States
CitySan Diego

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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