An insight into optical metrology in manufacturing

Yuki Shimizu, Liang Chia Chen, Dae Wook Kim, Xiuguo Chen, Xinghui Li, Hiraku Matsukuma

Research output: Contribution to journalReview articlepeer-review

69 Scopus citations

Fingerprint

Dive into the research topics of 'An insight into optical metrology in manufacturing'. Together they form a unique fingerprint.

Mathematics

Physics & Astronomy

Engineering & Materials Science