Skip to main navigation Skip to search Skip to main content

An imaging microscope at 121.6nm

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Optical design and system engineering of an imaging microscope with a Lyman-αsource at 121.6nm is presented. Preliminary imaging experiments and results are shown, and future implementation of the system is discussed.

Original languageEnglish (US)
Title of host publicationFreeform Optics, Freeform 2017
PublisherOptica Publishing Group (formerly OSA)
ISBN (Electronic)9781943580316
StatePublished - 2017
EventFreeform Optics, Freeform 2017 - Denver, United States
Duration: Jul 9 2017Jul 13 2017

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceFreeform Optics, Freeform 2017
Country/TerritoryUnited States
CityDenver
Period7/9/177/13/17

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

Fingerprint

Dive into the research topics of 'An imaging microscope at 121.6nm'. Together they form a unique fingerprint.

Cite this