An imaging microscope at 121.6nm

Weichuan Gao; Emily Finan; Byeongjoon Jeong; Geon Hee Kim; Youngsik Kim; Tom Milster

doi:10.1364/FREEFORM.2017.JTu5A.6

An imaging microscope at 121.6nm

Weichuan Gao, Emily Finan, Byeongjoon Jeong, Geon Hee Kim, Youngsik Kim, Tom Milster

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Optical design and system engineering of an imaging microscope with a Lyman-a source at 121.6nm is presented. Preliminary imaging experiments and results are shown, and future implementation of the system is discussed.

Original language	English (US)
Title of host publication	Optical Design and Fabrication, Freeform 2017
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Print)	9781943580316
DOIs	https://doi.org/10.1364/FREEFORM.2017.JTu5A.6
State	Published - 2017
Event	Optical Design and Fabrication, Freeform 2017 - Denver, United States Duration: Jul 9 2017 → Jul 13 2017

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F50-Freeform 2017
ISSN (Electronic)	2162-2701

Other

Other	Optical Design and Fabrication, Freeform 2017
Country/Territory	United States
City	Denver
Period	7/9/17 → 7/13/17

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials

Access to Document

10.1364/FREEFORM.2017.JTu5A.6

Cite this

Gao, W, Finan, E, Jeong, B, Kim, GH, Kim, Y & Milster, T 2017, An imaging microscope at 121.6nm. in Optical Design and Fabrication, Freeform 2017. Optics InfoBase Conference Papers, vol. Part F50-Freeform 2017, Optica Publishing Group (formerly OSA), Optical Design and Fabrication, Freeform 2017, Denver, United States, 7/9/17. https://doi.org/10.1364/FREEFORM.2017.JTu5A.6

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title = "An imaging microscope at 121.6nm",

abstract = "Optical design and system engineering of an imaging microscope with a Lyman-a source at 121.6nm is presented. Preliminary imaging experiments and results are shown, and future implementation of the system is discussed.",

author = "Weichuan Gao and Emily Finan and Byeongjoon Jeong and Kim, {Geon Hee} and Youngsik Kim and Tom Milster",

note = "Publisher Copyright: {\textcopyright} OSA 2017.; Optical Design and Fabrication, Freeform 2017 ; Conference date: 09-07-2017 Through 13-07-2017",

year = "2017",

doi = "10.1364/FREEFORM.2017.JTu5A.6",

language = "English (US)",

isbn = "9781943580316",

series = "Optics InfoBase Conference Papers",

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booktitle = "Optical Design and Fabrication, Freeform 2017",

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T1 - An imaging microscope at 121.6nm

AU - Gao, Weichuan

AU - Finan, Emily

AU - Jeong, Byeongjoon

AU - Kim, Geon Hee

AU - Kim, Youngsik

AU - Milster, Tom

PY - 2017

Y1 - 2017

N2 - Optical design and system engineering of an imaging microscope with a Lyman-a source at 121.6nm is presented. Preliminary imaging experiments and results are shown, and future implementation of the system is discussed.

AB - Optical design and system engineering of an imaging microscope with a Lyman-a source at 121.6nm is presented. Preliminary imaging experiments and results are shown, and future implementation of the system is discussed.

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UR - http://www.scopus.com/inward/citedby.url?scp=85027986030&partnerID=8YFLogxK

U2 - 10.1364/FREEFORM.2017.JTu5A.6

DO - 10.1364/FREEFORM.2017.JTu5A.6

M3 - Conference contribution

AN - SCOPUS:85027986030

SN - 9781943580316

T3 - Optics InfoBase Conference Papers

BT - Optical Design and Fabrication, Freeform 2017

PB - Optica Publishing Group (formerly OSA)

T2 - Optical Design and Fabrication, Freeform 2017

Y2 - 9 July 2017 through 13 July 2017

ER -

An imaging microscope at 121.6nm

Abstract

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Other

ASJC Scopus subject areas

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