An imaging microscope at 121.6nm

Weichuan Gao, Emily Finan, Byeongjoon Jeong, Geon Hee Kim, Youngsik Kim, Tom Milster

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Optical design and system engineering of an imaging microscope with a Lyman-a source at 121.6nm is presented. Preliminary imaging experiments and results are shown, and future implementation of the system is discussed.

Original languageEnglish (US)
Title of host publicationOptical Design and Fabrication, Freeform 2017
PublisherOptica Publishing Group (formerly OSA)
ISBN (Print)9781943580316
StatePublished - 2017
EventOptical Design and Fabrication, Freeform 2017 - Denver, United States
Duration: Jul 9 2017Jul 13 2017

Publication series

NameOptics InfoBase Conference Papers
VolumePart F50-Freeform 2017
ISSN (Electronic)2162-2701


OtherOptical Design and Fabrication, Freeform 2017
Country/TerritoryUnited States

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials


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