Aluminum nitride piezo-optomechanical nanobeam cavity

Hong X. Tang; Linran Fan; Xiankai Sun; Chi Xiong; Carsten Schuck

Aluminum nitride piezo-optomechanical nanobeam cavity

Hong X. Tang, Linran Fan, Xiankai Sun, Chi Xiong, Carsten Schuck

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We develop a piezoelectrically actuated, one-dimensional photonic and phononic crystal nanocavity fabricated from aluminum nitride. High-quality piezo-optomechanical nanobeam cavities with optical Qo of 1.2 × 10⁵ and mechanical Qm over 10,000 are obtained.

Original language	English (US)
Title of host publication	CLEO
Subtitle of host publication	Science and Innovations, CLEO_SI 2013
Pages	CW1F.5
State	Published - 2013
Externally published	Yes
Event	CLEO: Science and Innovations, CLEO_SI 2013 - San Jose, CA, United States Duration: Jun 9 2013 → Jun 14 2013

Publication series

Name	CLEO: Science and Innovations, CLEO_SI 2013

Other

Other	CLEO: Science and Innovations, CLEO_SI 2013
Country/Territory	United States
City	San Jose, CA
Period	6/9/13 → 6/14/13

ASJC Scopus subject areas

Computer Networks and Communications
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics

Cite this

@inproceedings{a8f21db7cc994828ae6151f41a1b72f7,

title = "Aluminum nitride piezo-optomechanical nanobeam cavity",

abstract = "We develop a piezoelectrically actuated, one-dimensional photonic and phononic crystal nanocavity fabricated from aluminum nitride. High-quality piezo-optomechanical nanobeam cavities with optical Qo of 1.2 × 105 and mechanical Qm over 10,000 are obtained.",

author = "Tang, {Hong X.} and Linran Fan and Xiankai Sun and Chi Xiong and Carsten Schuck",

year = "2013",

language = "English (US)",

isbn = "9781557529725",

series = "CLEO: Science and Innovations, CLEO_SI 2013",

pages = "CW1F.5",

booktitle = "CLEO",

note = "CLEO: Science and Innovations, CLEO_SI 2013 ; Conference date: 09-06-2013 Through 14-06-2013",

}

TY - GEN

T1 - Aluminum nitride piezo-optomechanical nanobeam cavity

AU - Tang, Hong X.

AU - Fan, Linran

AU - Sun, Xiankai

AU - Xiong, Chi

AU - Schuck, Carsten

PY - 2013

Y1 - 2013

N2 - We develop a piezoelectrically actuated, one-dimensional photonic and phononic crystal nanocavity fabricated from aluminum nitride. High-quality piezo-optomechanical nanobeam cavities with optical Qo of 1.2 × 105 and mechanical Qm over 10,000 are obtained.

AB - We develop a piezoelectrically actuated, one-dimensional photonic and phononic crystal nanocavity fabricated from aluminum nitride. High-quality piezo-optomechanical nanobeam cavities with optical Qo of 1.2 × 105 and mechanical Qm over 10,000 are obtained.

UR - http://www.scopus.com/inward/record.url?scp=84887458283&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84887458283&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84887458283

SN - 9781557529725

T3 - CLEO: Science and Innovations, CLEO_SI 2013

SP - CW1F.5

BT - CLEO

T2 - CLEO: Science and Innovations, CLEO_SI 2013

Y2 - 9 June 2013 through 14 June 2013

ER -

Aluminum nitride piezo-optomechanical nanobeam cavity

Abstract

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Other

ASJC Scopus subject areas

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