TY - GEN
T1 - Aluminum nitride piezo-optomechanical nanobeam cavity
AU - Tang, Hong X.
AU - Fan, Linran
AU - Sun, Xiankai
AU - Xiong, Chi
AU - Schuck, Carsten
PY - 2013
Y1 - 2013
N2 - We develop a piezoelectrically actuated, one-dimensional photonic and phononic crystal nanocavity fabricated from aluminum nitride. High-quality piezo-optomechanical nanobeam cavities with optical Qo of 1.2 × 105 and mechanical Qm over 10,000 are obtained.
AB - We develop a piezoelectrically actuated, one-dimensional photonic and phononic crystal nanocavity fabricated from aluminum nitride. High-quality piezo-optomechanical nanobeam cavities with optical Qo of 1.2 × 105 and mechanical Qm over 10,000 are obtained.
UR - http://www.scopus.com/inward/record.url?scp=84887458283&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84887458283&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84887458283
SN - 9781557529725
T3 - CLEO: Science and Innovations, CLEO_SI 2013
SP - CW1F.5
BT - CLEO
T2 - CLEO: Science and Innovations, CLEO_SI 2013
Y2 - 9 June 2013 through 14 June 2013
ER -