Aluminum nitride piezo-optomechanical nanobeam cavity

Hong X. Tang, Linran Fan, Xiankai Sun, Chi Xiong, Carsten Schuck

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We develop a piezoelectrically actuated, one-dimensional photonic and phononic crystal nanocavity fabricated from aluminum nitride. High-quality piezo-optomechanical nanobeam cavities with optical Qo of 1.2 × 105 and mechanical Qm over 10,000 are obtained.

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2013
StatePublished - 2013
EventCLEO: Science and Innovations, CLEO_SI 2013 - San Jose, CA, United States
Duration: Jun 9 2013Jun 14 2013

Publication series

NameCLEO: Science and Innovations, CLEO_SI 2013


OtherCLEO: Science and Innovations, CLEO_SI 2013
Country/TerritoryUnited States
CitySan Jose, CA

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics


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