@inproceedings{6760d0d981e54ffeb7d206d32d61dc67,
title = "Aluminum nitride piezo-optomechanical nanobeam cavity",
abstract = "We develop a piezoelectrically actuated, one-dimensional photonic and phononic crystal nanocavity fabricated from aluminum nitride. High-quality piezo-optomechanical nanobeam cavities with optical Qo of 1.2 × 105 and mechanical Qm over 10,000 are obtained.",
author = "Linran Fan and Xiankai Sun and Chi Xiong and Carsten Schuck and Tang, {Hong X.}",
year = "2013",
doi = "10.1364/cleo_si.2013.cw1f.5",
language = "English (US)",
isbn = "9781557529725",
series = "2013 Conference on Lasers and Electro-Optics, CLEO 2013",
publisher = "IEEE Computer Society",
booktitle = "2013 Conference on Lasers and Electro-Optics, CLEO 2013",
note = "2013 Conference on Lasers and Electro-Optics, CLEO 2013 ; Conference date: 09-06-2013 Through 14-06-2013",
}