Aluminum nitride piezo-acousto-photonic crystal nanocavity with high quality factors

Linran Fan, Xi'Ankai Sun, Chi Xiong, Carsten Schuck, Hong X. Tang

Research output: Contribution to journalArticlepeer-review

61 Scopus citations


We develop a piezoelectrically actuated, one-dimensional acoustic and photonic crystal nanocavity fabricated from aluminum nitride (AlN). Through simultaneous band structure engineering in both photonic and acoustic domains, we obtain high-quality piezo-acousto-photonic crystal nanocavities with intrinsic optical Q of 1.2 × 105. The piezoelectric actuation of the confined mechanical mode at 3.18 GHz is demonstrated with mechanical Q exceeding 10 000. Such piezo-acousto-photonic crystal nanocavities will find important applications in cavity optomechanics that desire effective coupling to the electrical degree of freedom.

Original languageEnglish (US)
Article number153507
JournalApplied Physics Letters
Issue number15
StatePublished - Apr 15 2013

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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