Aluminum nitride piezo-acousto-photonic crystal nanocavity with high quality factors

Linran Fan; Xi'Ankai Sun; Chi Xiong; Carsten Schuck; Hong X. Tang

doi:10.1063/1.4802250

Aluminum nitride piezo-acousto-photonic crystal nanocavity with high quality factors

Linran Fan, Xi'Ankai Sun, Chi Xiong, Carsten Schuck, Hong X. Tang

Research output: Contribution to journal › Article › peer-review

66 Scopus citations

Abstract

We develop a piezoelectrically actuated, one-dimensional acoustic and photonic crystal nanocavity fabricated from aluminum nitride (AlN). Through simultaneous band structure engineering in both photonic and acoustic domains, we obtain high-quality piezo-acousto-photonic crystal nanocavities with intrinsic optical Q of 1.2 × 10⁵. The piezoelectric actuation of the confined mechanical mode at 3.18 GHz is demonstrated with mechanical Q exceeding 10 000. Such piezo-acousto-photonic crystal nanocavities will find important applications in cavity optomechanics that desire effective coupling to the electrical degree of freedom.

Original language	English (US)
Article number	153507
Journal	Applied Physics Letters
Volume	102
Issue number	15
DOIs	https://doi.org/10.1063/1.4802250
State	Published - Apr 15 2013
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.4802250

Cite this

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title = "Aluminum nitride piezo-acousto-photonic crystal nanocavity with high quality factors",

abstract = "We develop a piezoelectrically actuated, one-dimensional acoustic and photonic crystal nanocavity fabricated from aluminum nitride (AlN). Through simultaneous band structure engineering in both photonic and acoustic domains, we obtain high-quality piezo-acousto-photonic crystal nanocavities with intrinsic optical Q of 1.2 × 105. The piezoelectric actuation of the confined mechanical mode at 3.18 GHz is demonstrated with mechanical Q exceeding 10 000. Such piezo-acousto-photonic crystal nanocavities will find important applications in cavity optomechanics that desire effective coupling to the electrical degree of freedom.",

author = "Linran Fan and Xi'Ankai Sun and Chi Xiong and Carsten Schuck and Tang, {Hong X.}",

note = "Funding Information: We acknowledge funding from DARPA/MTO ORCHID program through a grant from the Air Force Office of Scientific Research (AFOSR). Facilities used were supported by Yale Institute for Nanoscience and Quantum Engineering and NSF MRSEC DMR 1119826. H.X.T. acknowledges support from the National Science Foundation CAREER award and a Packard Fellowship in Science and Engineering. The authors thank Michael Power and Dr. Michael Rooks for assistance in device fabrication. ",

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doi = "10.1063/1.4802250",

language = "English (US)",

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AU - Fan, Linran

AU - Sun, Xi'Ankai

AU - Xiong, Chi

AU - Schuck, Carsten

AU - Tang, Hong X.

N1 - Funding Information: We acknowledge funding from DARPA/MTO ORCHID program through a grant from the Air Force Office of Scientific Research (AFOSR). Facilities used were supported by Yale Institute for Nanoscience and Quantum Engineering and NSF MRSEC DMR 1119826. H.X.T. acknowledges support from the National Science Foundation CAREER award and a Packard Fellowship in Science and Engineering. The authors thank Michael Power and Dr. Michael Rooks for assistance in device fabrication.

PY - 2013/4/15

Y1 - 2013/4/15

N2 - We develop a piezoelectrically actuated, one-dimensional acoustic and photonic crystal nanocavity fabricated from aluminum nitride (AlN). Through simultaneous band structure engineering in both photonic and acoustic domains, we obtain high-quality piezo-acousto-photonic crystal nanocavities with intrinsic optical Q of 1.2 × 105. The piezoelectric actuation of the confined mechanical mode at 3.18 GHz is demonstrated with mechanical Q exceeding 10 000. Such piezo-acousto-photonic crystal nanocavities will find important applications in cavity optomechanics that desire effective coupling to the electrical degree of freedom.

AB - We develop a piezoelectrically actuated, one-dimensional acoustic and photonic crystal nanocavity fabricated from aluminum nitride (AlN). Through simultaneous band structure engineering in both photonic and acoustic domains, we obtain high-quality piezo-acousto-photonic crystal nanocavities with intrinsic optical Q of 1.2 × 105. The piezoelectric actuation of the confined mechanical mode at 3.18 GHz is demonstrated with mechanical Q exceeding 10 000. Such piezo-acousto-photonic crystal nanocavities will find important applications in cavity optomechanics that desire effective coupling to the electrical degree of freedom.

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Aluminum nitride piezo-acousto-photonic crystal nanocavity with high quality factors

Abstract

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