@inproceedings{89263e4deef34f96be42b09d0a8fa58a,
title = "All-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect",
abstract = "We proposed and demonstrated a new all-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect cable in which a vertical light coupler is integrated. The approach potentially cut down the cost by eliminating a metallization process for alignment of multiple masks. Throughout the process we used a polyimide as the substrate, coated by Epoclad as claddings, then AP2210B and WPR 5100 were used to fabricate waveguides and 45 degree mirror couplers, respectively. In addition, precisely aligned mirror couplers to waveguides are achieved by using polymer-based, non-metallic, and transparent phase-based alignment marks. We tested a feature specific phase-based alignment system. In addition, the shape and depth of the phase-based alignment marks are optimized for phase contrast and Schlieren imaging. Our results shows that a contrast of the image is enhanced compared to that of observed by a conventional imaging system. Such process enables to integrate polymer based waveguides by only using the polymer based alignment marks on the WPR 5100 layer. Downloading of the abstract is permitted for personal use only.",
keywords = "All polymer, Flexible optical interconnect, Lithography, Phase contrast microscopy, Schlieren imaging system",
author = "Jilin Yang and Tao Ge and Chris Summitt and Sunglin Wang and Milster, {Thomas D} and Yuzuru Takashima",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; Nanoengineering: Fabrication, Properties, Optics, and Devices XII ; Conference date: 11-08-2015 Through 12-08-2015",
year = "2015",
doi = "10.1117/12.2187143",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Dobisz, {Elizabeth A.} and Eldada, {Louay A.} and Campo, {Eva M.}",
booktitle = "Nanoengineering",
}