All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror

Eunmo Kang, Heejoo Choi, Brandon Hellman, Joshua Rodriguez, Braden Smith, Xianyue Deng, Parker Liu, Ted Liang Tai Lee, Eric Evans, Yifan Hong, Jiafan Guan, Chuan Luo, Yuzuru Takashima

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

In a lidar system, replacing moving components with solid-state devices is highly anticipated to make a reliable and compact lidar system, provided that a substantially large beam area with a large angular extent as well as high angular resolution is assured for the lidar transmitter and receiver. A new quasi-solid-state lidar optical architecture employs a transmitter with a two-dimensional MEMS mirror for fine beam steering at a fraction of the degree of the angular resolution and is combined with a digital micromirror device for wide FOV scanning over 37 degree while sustaining a large aperture area of 140 mm squared. In the receiver, a second digital micromirror device is synchronized to the transmitter DMD, which enables a large FOV receiver. An angular resolution of (Formula presented.) by (Formula presented.) was achieved with 0.588 fps for scanning 1344 points within the field of view.

Original languageEnglish (US)
Article number1444
JournalMicromachines
Volume13
Issue number9
DOIs
StatePublished - Sep 2022

Keywords

  • MEMS
  • MEMS mirror
  • digital micromirror device
  • lidar
  • solid-state lidar
  • time-of-flight

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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