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Aggressive diamond characterization and wear analysis during chemical mechanical planarization
Changhong Wu, Yun Zhuang, Xiaoyan Liao, Yubo Jiao, Yasa Adi Sampurno, Siannie Theng, Fred Sun, Ananth Naman, Ara Philipossian
Research output: Contribution to journal › Article › peer-review
11
Scopus
citations