@inproceedings{ae49bcfc25544c4ba22755a0cff1eb3c,
title = "Acoustic characterization of two megasonic devices for photomask cleaning",
author = "Claudio Zanelli and Dushyanth Giridhar and Manish Keswani and Nagaya Okada and Jyhwei Hsu and Petrie Yam",
year = "2016",
doi = "10.1117/12.2243124",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Kasprowicz, \{Bryan S.\} and Buck, \{Peter D.\}",
booktitle = "Photomask Technology 2016",
note = "Photomask Technology 2016 ; Conference date: 12-09-2016 Through 14-09-2016",
}