Acid-catalyzed dehydration for the design of chemical amplification resists

H. Ito, R. Sooriyakumaran, Y. Maekawa, E. A. Mash

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Scopus citations

Fingerprint

Dive into the research topics of 'Acid-catalyzed dehydration for the design of chemical amplification resists'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds