Absorption Controlled Photo-Imageable Silanes for Integrated Optics

A new class of fluoro-substituted hybrid organic-inorganic materials for integrated optics was proposed. Material composition and process parameters were optimized to achieve minimum internal absorptions and propagation losses. Beam splitters were designed and fabricated, which exhibit <0.5 dB power uniformity and <1.5 dB coupling losses. The results indicate that these materials exhibit an internal losses 30 times lower than conventional ORMOSIL silanes.