A new class of fluoro-substituted hybrid organic-inorganic materials for integrated optics was proposed. Material composition and process parameters were optimized to achieve minimum internal absorptions and propagation losses. Beam splitters were designed and fabricated, which exhibit <0.5 dB power uniformity and <1.5 dB coupling losses. The results indicate that these materials exhibit an internal losses 30 times lower than conventional ORMOSIL silanes.
|Original language||English (US)|
|Number of pages||2|
|State||Published - 2003|
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering