Absolute thickness metrology with submicrometer accuracy using a low-coherence distance measuring interferometer

Yang Zhao; Greg Schmidt; Duncan T. Moore; Jonathan D. Ellis

doi:10.1364/AO.54.007693

Absolute thickness metrology with submicrometer accuracy using a low-coherence distance measuring interferometer

Yang Zhao, Greg Schmidt, Duncan T. Moore, Jonathan D. Ellis

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

Absolute physical thickness across the sample aperture is critical in determining the index of a refraction profile from the optical path length profile for gradient index (GRIN) materials, which have a designed inhomogeneous refractive index. Motivated by this application, instrumentation was established to measure the absolute thickness of samples with nominally plane-parallel surfaces up to 50 mm thick. The current system is capable of measuring absolute thickness with 120 nm (1?) repeatability and submicrometer expanded measurement uncertainty. Beside GRIN materials, this method is also capable of measuring other inhomogeneous and opaque materials.

Original language	English (US)
Pages (from-to)	7693-7700
Number of pages	8
Journal	Applied optics
Volume	54
Issue number	25
DOIs	https://doi.org/10.1364/AO.54.007693
State	Published - Sep 1 2015
Externally published	Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Engineering (miscellaneous)
Electrical and Electronic Engineering

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10.1364/AO.54.007693

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abstract = "Absolute physical thickness across the sample aperture is critical in determining the index of a refraction profile from the optical path length profile for gradient index (GRIN) materials, which have a designed inhomogeneous refractive index. Motivated by this application, instrumentation was established to measure the absolute thickness of samples with nominally plane-parallel surfaces up to 50 mm thick. The current system is capable of measuring absolute thickness with 120 nm (1?) repeatability and submicrometer expanded measurement uncertainty. Beside GRIN materials, this method is also capable of measuring other inhomogeneous and opaque materials.",

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Absolute thickness metrology with submicrometer accuracy using a low-coherence distance measuring interferometer

Abstract

ASJC Scopus subject areas

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