Absolute thickness metrology with high precision using low coherence interferometry

Yang Zhao; Greg Schmidt; Duncan T. Moore; Jonathan D. Ellis

Absolute thickness metrology with high precision using low coherence interferometry

Yang Zhao, Greg Schmidt, Duncan T. Moore, Jonathan D. Ellis

Optical Sciences, College of

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In refractive index profile measurement for gradient index (GRIN) materials which have designed inhomogeneous refractive index, sample thickness variations across the aperture are required to be measured to obtain accurate index profiles. In this work, instrumentation was developed to measure the absolute thickness map of samples with parallel specular surfaces up to 10 mm thick, with the ability to measure the surface figure of both sides. Using this system, we are able to measure absolute sample thickness currently accurate to sub micrometer levels, based on the short coherence length of the light source. Besides gradient index materials, this method is also potentially capable of measuring other inhomogeneous and opaque materials.

Original language	English (US)
Title of host publication	Proceedings - ASPE 2014 Annual Meeting
Publisher	American Society for Precision Engineering, ASPE
Pages	417-421
Number of pages	5
ISBN (Electronic)	9781887706667
State	Published - 2014
Event	29th Annual Meeting of the American Society for Precision Engineering, ASPE 2014 - Boston, United States Duration: Nov 9 2014 → Nov 14 2014

Publication series

Name	Proceedings - ASPE 2014 Annual Meeting

Conference

Conference	29th Annual Meeting of the American Society for Precision Engineering, ASPE 2014
Country/Territory	United States
City	Boston
Period	11/9/14 → 11/14/14

ASJC Scopus subject areas

General Engineering

Cite this

Absolute thickness metrology with high precision using low coherence interferometry. / Zhao, Yang; Schmidt, Greg; Moore, Duncan T. et al.
Proceedings - ASPE 2014 Annual Meeting. American Society for Precision Engineering, ASPE, 2014. p. 417-421 (Proceedings - ASPE 2014 Annual Meeting).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zhao, Y, Schmidt, G, Moore, DT & Ellis, JD 2014, Absolute thickness metrology with high precision using low coherence interferometry. in Proceedings - ASPE 2014 Annual Meeting. Proceedings - ASPE 2014 Annual Meeting, American Society for Precision Engineering, ASPE, pp. 417-421, 29th Annual Meeting of the American Society for Precision Engineering, ASPE 2014, Boston, United States, 11/9/14.

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Absolute thickness metrology with high precision using low coherence interferometry

Abstract

Publication series

Conference

ASJC Scopus subject areas

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