A thermodynamic field theory for anodic bonding of micro electro-mechanical systems (MEMS)

Keyphrases

• Non-material 100%
• Thermodynamic Fields 100%
• Second Law 50%
• Second Law of Thermodynamics 50%
• Bondline 50%
• Global Equations 50%
• Bonded Interface 50%
• Thermodynamic Potential 50%
• Dissipation Inequality 50%

Engineering

• Laws of Thermodynamics 50%
• Dissipation Inequality 50%
• Thermodynamic Potential 50%
• Bonded Interface 50%
• Forming Line 50%