A Systematic Analysis of Symmetric Three-Electrode Electrostatic Lenses

Miklos Szilagyi; JenÖ Szep

doi:10.1109/T-ED.1987.23365

A Systematic Analysis of Symmetric Three-Electrode Electrostatic Lenses

Miklos Szilagyi, JenÖ Szep

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

A thorough investigation of a class of axially symmetric three-electrode einzel lenses is given. The study is based on the analysis of axial potential distributions. Two different central/outer voltage ratios are examined. The spherical and chromatic aberration coefficients of a large class of lens models are calculated and plotted. For both voltage ratios general conclusions are drawn for the axial potential functions and electrode shapes that have small aberration coefficients. An electrostatic lens with small spherical aberration is given. General criteria are established for the design of symmetric three-electrodc lenses.

Original language	English (US)
Pages (from-to)	2634-2642
Number of pages	9
Journal	IEEE Transactions on Electron Devices
Volume	34
Issue number	12
DOIs	https://doi.org/10.1109/T-ED.1987.23365
State	Published - Dec 1987

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/T-ED.1987.23365

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AB - A thorough investigation of a class of axially symmetric three-electrode einzel lenses is given. The study is based on the analysis of axial potential distributions. Two different central/outer voltage ratios are examined. The spherical and chromatic aberration coefficients of a large class of lens models are calculated and plotted. For both voltage ratios general conclusions are drawn for the axial potential functions and electrode shapes that have small aberration coefficients. An electrostatic lens with small spherical aberration is given. General criteria are established for the design of symmetric three-electrodc lenses.

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A Systematic Analysis of Symmetric Three-Electrode Electrostatic Lenses

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